...硅微机械电容式麦克风;多目标优化;遗传算法;Pareto最优解集 [gap=811]Keywords : silicon condenser micromachined microphone;multi-objective optimal design;genetic algorithm;Pareto-optimal set zz')" href=..
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condenser silicon micromachined microphone 电容式硅微机械麦克风
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