最大图形信号频率,最高图像频率 maximum picture frequency 图像扫描频率 image sweep frequency ; image sweep frequency,image sweep frequency 最高图像电流频率 maximum frequency of picture current ..
Imageprocessingmethod is used to carry out frequencysweepandvoltagesweepmeasurement. Thein-planemotioncharacteristic of MEMS is obtainedandthetestingresultsare analyzedanddiscussed.