The thermal conductivity sensor integrating MEMS and semi-conductor technique can effectively enhance the measuring precision and reliability of the instrument.
本实用新型采用运用MEMS技术和半导体工艺集成而成的热导传感器,有效提高了测量精度和可靠性;
The experimental set -up and working principle of electromagnetic electrical conductivity sensor are briefly described. The experiment result and application are also presented.
简要地介绍了电磁式电导率传感器的实验装置和工作原理,同时也讨论了实验结果和应用。
In order to overcome the disadvantages of traditional method of gas concentration detection, a new method is proposed which keeps thermal conductivity sensor at a constant temperature.
为了克服传统热导传感器气体检测方法的诸多缺陷,提出了一种使传感器保持在恒温状态的气体浓度检测的新方法。
In order to overcome the disadvantages of traditional method of gas concentration detection, a new method is proposed which keeps thermal conductivity sensor at a constant temperature.
为了克服传统热导传感器气体检测方法的诸多缺陷,提出了一种使传感器保持在恒温状态的气体浓度检测的新方法。
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