In this paper, mainly introduce ultra high vacuum gauge intercomparison system.
本文主要介绍了全金属超高真空规管比对系统。
The control of ionization gauge controlled by a single board computer, which is used in vacuum system, is described in this paper.
本文介绍用单片机控制的电离计对真空系统的控制方法。
Vacuum system by vacuum gauge to measure.
系统的真空度可由真空计来测定。
An integrated CMOS-compatible Pirani vacuum sensor system has been investigated and developed in this work, combining the traditional Pirani gauge with the MEMS technology.
本文将传统的皮拉尼计与MEMS技术结合起来，研制了一款与标准CMOS工艺兼容的集成皮拉尼传感器系统。
The vacuum source is connected to the bottom of the valve, one side connection is for a gauge, the other side connects to the system in which vacuum is to be controlled.
真空源连接到阀门的底部，一边连接的压力表，对方连接到系统中，真空被控制。
The vacuum source is connected to the bottom of the valve, one side connection is for a gauge, the other side connects to the system in which vacuum is to be controlled.
真空源连接到阀门的底部，一边连接的压力表，对方连接到系统中，真空被控制。
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