With the increase of the implantation voltage, the root-mean-square roughness (RMS) of Zr films almost don't change.
随着注入高压的增加，薄膜的表面粗糙度均方根（RMS）值的变化不大。
With the increase of the implantation voltage, the root-mean-square roughness (RMS) of Zr films almost don't change.
随着注入高压的增加，薄膜的表面粗糙度均方根（RMS）值的变化不大。
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