The micro gas pressure sensor designed in this thesis can be fabricated using an IC compatible process, and it is composed of a heating resistor, a sensitive element and a testing resistor.
本文设计的微气压传感器的制作工艺与集成电路工艺兼容，结构上主要包括加热电阻、敏感元件和测试电阻等三部分。
The micro gas pressure sensor designed in this thesis can be fabricated using an IC compatible process, and it is composed of a heating resistor, a sensitive element and a testing resistor.
本文设计的微气压传感器的制作工艺与集成电路工艺兼容，结构上主要包括加热电阻、敏感元件和测试电阻等三部分。
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