In the vacuum holding module of wafer, the vacuum monitoring circuit is designed in order to collect and monitor the vacuum pressure in real-time.
真空夹持模块中，设计了真空回路，通过数据采集卡实时监测真空压力。
In the vacuum holding module of wafer, the vacuum monitoring circuit is designed in order to collect and monitor the vacuum pressure in real-time.
真空夹持模块中，设计了真空回路，通过数据采集卡实时监测真空压力。
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