characteristic extreme value
characteristic extreme value
特征极值
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Analyzes the principle errors in measuring small dimensions by Fraunhofer diffraction, including Fraunhofer approximation error and the place detecting error of extreme value characteristic aspect.
分析了用夫朗荷费衍射测量微小尺寸的原理误差,包括夫朗荷费近似误差和极值特征点位置探测误差。
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