Analyzes the principle errors in measuring small dimensions by Fraunhofer diffraction, including Fraunhofer approximation error and the place detecting error of extreme value characteristic aspect.
分析了用夫朗荷费衍射测量微小尺寸的原理误差，包括夫朗荷费近似误差和极值特征点位置探测误差。
Analyzes the principle errors in measuring small dimensions by Fraunhofer diffraction, including Fraunhofer approximation error and the place detecting error of extreme value characteristic aspect.
分析了用夫朗荷费衍射测量微小尺寸的原理误差，包括夫朗荷费近似误差和极值特征点位置探测误差。
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