The MOCVD system is specifically introduced, and the gas flow automatic control method based on the mass flow controller(MFC) and programmable logic controller(PLC) is studied and analyzed.
研究分析了基于质量流量控制器、可编程序控制器和触摸屏的自动控制系统气体流量自动控制方法。
A new type of indirect flow control method shows that liquid flow can be controlled with a mass flow controller on the squeeze air system.
介绍了一种新型的调压式流量控制方法，即通过气路安装质量流量控制器的方法对液路流量进行控制。
The circuit control system consists of a mass flow controller and a CPU mainly.
同时采用质量流量控制器、单片机为主体的电路控制系统。
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