... 关键词：超精密磨床；超精密磨削；金刚石砂轮；硅片；集成电路（IC） [gap=908]KeyWords： Ultra-precision grinding machine； Ultra-precision grinding； Diamond grinding wheel； Silicon wafers； IC ..
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Ultra-precision Cylindrical Grinding Machine Comm125超精密外圆磨床
Ultra-precision grinding machine is one of the key equipments in integrated circuit manufacturing, which is mainly used in both manufacture of primary wafer and backside thinning of patterned wafer.
硅片超精密磨床是半导体集成电路(IC)制造中的关键设备,主要应用在大直径硅片制造和背面减薄加工中。
参考来源 - 超精密磨床监控系统的设计与开发·2,447,543篇论文数据，部分数据来源于NoteExpress
This paper describes accurate surface profile measurement of an aspherical lens on an ultra-precision grinding machine using the error separation technique.
描述了一种在超精密磨削机床上基于误差分离法的非球面表面形状精密测量系统。
Discusses the problem of the machining of precision ultra thin shaft by using external cylindrical center-less grinding machine with bracket. The development progress is introduced.
探讨了利用普通无心外圆磨床加辅助附件的方法解决超细长轴的加工问题，介绍了加工超细长轴研制过程。
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