... 光栅扫描电子束光刻 raster scan electron beam lithography 光栅扫描写入 raster scan writing 光栅扫描影像 raster ...
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The principles and features of raster scan, the function of the pattern generator and the process of the electron beam writing on the substrate under the control system are also introduced.
介绍了图形发生器的作用及电子束在控制系统作用下在基片上描绘图形的过程。
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