• Aiming at the lost accuracy happened in HEL (hot embossing lithography) because of thermal distortion, room-temperature imprint lithography is proposed.

    针对热压光刻工艺变形而导致精度丧失问题,提出了冷压光刻。

    youdao

  • Aiming at the lost accuracy happened in HEL (hot embossing lithography) because of thermal distortion, room-temperature imprint lithography is proposed.

    针对热压光刻工艺变形而导致精度丧失问题,提出了冷压光刻。

    youdao

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