• Aiming at the lost accuracy happened in HEL (hot embossing lithography) because of thermal distortion, room-temperature imprint lithography is proposed.

    针对热压光刻工艺变形而导致精度丧失问题,提出了冷压光刻。

    www.dictall.com

  • A micron-precision optical alignment system is developed for three-dimensional Micro Electro-Mechanical System(MEMS) device fabrication based on multi-layer imprint lithography.

    针对基于微压成形三维MEMS器件制造工艺多层压印的需要,开发了一套基于视频图像对正原理的压印光刻对准系统

    dict.cnki.net

  • The mold manufacturing is the key part in imprint lithography process, which includes electron beam direct writing, stepping molding, and the conversion from small mold to big mold.

    采用电子束步进制模、压翻制的压印模具生产工艺模具的制造目前面临的难点。

    dict.cnki.net

  • The mold manufacturing is the key part in imprint lithography process, which includes electron beam direct writing, stepping molding, and the conversion from small mold to big mold.

    采用电子束步进制模、压翻制的压印模具生产工艺模具的制造目前面临的难点。

    dict.cnki.net

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