• The MOCVD system is specifically introduced, and the gas flow automatic control method based on the mass flow controller(MFC) and programmable logic controller(PLC) is studied and analyzed.

    研究分析了基于质量流量控制器可编程序控制器触摸屏自动控制系统气体流量自动控制方法

    dict.cnki.net

  • The MOCVD system is specifically introduced, and the gas flow automatic control method based on the mass flow controller(MFC) and programmable logic controller(PLC) is studied and analyzed.

    研究分析了基于质量流量控制器可编程序控制器触摸屏自动控制系统气体流量自动控制方法

    dict.cnki.net

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