氮元素对Cr-Si-Al电阻薄膜晶化行为及电性能的影响 - TNMSC 关键字: 电阻薄膜;晶化;氮;电学稳定性[gap=996]Key words: resistive films; crystallization; nitrogen; electrical stability
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resistive thin films 电阻薄膜
sensitive resistive thin films 敏感电阻薄膜
high-stable resistive thin films 高稳定电阻薄膜
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