精密测头技术的演变与发展趋势_电子资料文库 关键词: 测头 精密测量 精密量仪 三坐标测量机 [gap=681]Key words:Probe; Precision measurement; Precision measurement instrument; CMM
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Dual-frequency laser interferometer is a widely used precision measurement instrument.
双频激光干涉仪是应用广泛的精密测量仪器。
The Rockwell hardness tester is a precision measurement instrument in material and part hardness testing, which is often used in detection of materials, product and half-finished product.
洛氏硬度计是检测材料和零件硬度较精密的计量仪器，用来测量材料或者成品半成品的相应硬度，其性能指标主要体现在检测精度和操控性两个方面。
It is an objective for nanometer instrument researcher to improve the measurement precision of scanning probe microscope (SPM), the eye and hand of nanometer science and technology.
提高作为纳米科技的“眼”和“手”的扫描探针显微镜(SPM)的测量和定位精度，是纳米仪器界始终追求的目标。
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