The optimization of the MEMS fabrication process is analyzed.
分析了MEMS制作工艺的改进。
The kernel problem in virtual MEMS fabrication process is process model.
MEMS加工工艺的核心是工艺模型。
In the design and fabrication of MEMS devices, MEMS fabrication process based on Silicon is a main technology, to which is deeply paid attention by researchers and industries.
在MEMS器件的设计与加工过程中，键合技术是体硅工艺的一项关键技术。
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