The emission spectra of he plasma were measured by using three types of experiment devices: dielectric barrier discharge device, hollow-cathode discharge device and Penning discharge device.

采用三种实验装置(介质阻挡放电装置、空心阴极放电装置和彭宁放电装置)分别测量了不同压强范围内氦等离子体的发射光谱。

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A discharge model on the sputtering hollow cathode discharge (SHCD) copper ion laser is established, its characteristics of discharge, sputtering and the particle interaction processes are analysed.

本文祥细分析了溅射型空心阴极放电(SHCD)铜离子激光器的放电、溅射特性和粒子的相互作用过程，建立了放电模型。

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The power has been used to conduct two sorts of experiments including both to restrain arc discharge and to control hollow cathode discharge.

采用中频交流脉冲等离子体源进行了抑制弧光放电和空心阴极效应以及离子渗氮工艺的实验。

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