Waveguides formed by heavy ions implantation show an unique advantages: the beam dose can be 1-3 order lower than that of light ion implantation and it can reduce the fabrication cost significantly.
利用重离子注入形成光波导表现出独特的优点：与轻离子注入相比，注入剂量可以降低1 ~ 3个数量级，可以大大降低制造成本。
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