Light path of an alignment system based on four-quadrant photo-detector is analyzed. The determination for input-output characteristics of the system is transformed as calculating the illumination area,and the calculation method for every quadrant is given.
通过对基于四像限光电探测器的对准系统的光路分析,将系统的输入输出关系的确定转化为平面光照面积的计算,并给出了探测器各像限光照面积的求取方法,从而构建了该系统的数学模型。
参考来源 - 基于系统建模的四像限光电探测器对准与微位移测量系统Light path of an alignment system based on four-quadrant photo-detector is analyzed. The determination for input-output characteristics of the system is transformed as calculating the illumination area,and the calculation method for every quadrant is given.
通过对基于四像限光电探测器的对准系统的光路分析,将系统的输入输出关系的确定转化为平面光照面积的计算,并给出了探测器各像限光照面积的求取方法,从而构建了该系统的数学模型。
参考来源 - 基于系统建模的四像限光电探测器对准与微位移测量系统·2,447,543篇论文数据，部分数据来源于NoteExpress
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