central gas supply plant 中心供气装置
central gas supply system 供气系统
central protective gas supply 中央保护气体供应站
The edge gas plenum is connected to a central gas plenum disposed within and near the center of the substrate support through a plurality of gas supply channels.
该边缘气体室通过多个气体供应管道连接至一个设置在该基片支撑件内且靠近该基片支撑件中心的中央气体室。
The gas guiding portion guides source gas to the central portion of the plate and suspends the metal catalysts discharged from the catalyst supply hole in a specific direction.
所述气体引导部将源气体引导至所述板子的中心部分，并使从所述催化剂供应孔排出的金属催化剂沿特定方向悬浮。
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