A computerized system has been developed for real time, in-situ monitoring and control of thin film growth by deposition.
阐述了用声阻抗法实时监测薄膜沉积的原理，介绍了一种使用个人计算机的实时测控系统。
A computerized system has been developed for real time, in-situ monitoring and control of thin film growth by deposition.
阐述了用声阻抗法实时监测薄膜沉积的原理，介绍了一种使用个人计算机的实时测控系统。
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