Often the temperature and ambient changes of the micro flow sensor cause undesired changes in parameters that are supposed to be constant.
通常，温度和环境的变化会使某些被认为是常量的参量发生意外的变化。
Based on some related micro machining processes, a process flow is planed to fabricate make the piezoresistive sensor chip successfully.
基于一些相关的微加工工艺制定了制作这种微传感器的工艺流程并且制作成功了传感芯片。
The paper introduce a electromagnetic flow sensor excited by permanent magnets, which have advantages of structure simplification, micro power and quick response.
为了实现电磁流量传感器的结构简单、功耗低、响应速度快，本文介绍了一种永磁式电磁流量传感器。
The paper introduce a electromagnetic flow sensor excited by permanent magnets, which have advantages of structure simplification, micro power and quick response.
为了实现电磁流量传感器的结构简单、功耗低、响应速度快，本文介绍了一种永磁式电磁流量传感器。
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