• A computerized system has been developed for real time, in-situ monitoring and control of thin film growth by deposition.

    阐述了用声阻抗法实时监测薄膜沉积原理,介绍了使用个人计算机实时测控系统

    dx.doi.org

  • A computerized system has been developed for real time, in-situ monitoring and control of thin film growth by deposition.

    阐述了用声阻抗法实时监测薄膜沉积原理,介绍了使用个人计算机实时测控系统

    dx.doi.org

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